238000000059 patterning Methods 0.000 claims description 2.238000010438 heat treatment Methods 0.000 claims description 5.239000000969 carrier Substances 0.000 claims description 6.238000000151 deposition Methods 0.000 claims description 7.230000003749 cleanliness Effects 0.000 claims description 9.238000001465 metallisation Methods 0.000 claims description 10.238000009792 diffusion process Methods 0.000 claims description 10.229910052751 metal Inorganic materials 0.000 claims description 13.238000005215 recombination Methods 0.000 claims description 21.238000010192 crystallographic characterization Methods 0.000 claims description 43.
230000005611 electricity Effects 0.000 claims abstract description 7.239000004065 semiconductor Substances 0.000 claims abstract description 117.238000004519 manufacturing process Methods 0.000 title claims abstract description 22.Assignors: WILMINGTON TRUST, NATIONAL ASSOCIATION Status Expired - Fee Related legal-status Critical Current Adjusted expiration legal-status Critical Links RELEASE BY SECURED PARTY (SEE DOCUMENT FOR DETAILS).
Assignors: WILMINGTON TRUST, NATIONAL ASSOCIATION Assigned to GLOBALFOUNDRIES U.S. ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assigned to WILMINGTON TRUST, NATIONAL ASSOCIATION reassignment WILMINGTON TRUST, NATIONAL ASSOCIATION SECURITY AGREEMENT Assignors: GLOBALFOUNDRIES INC. Assignors: INTERNATIONAL BUSINESS MACHINES CORPORATION Assigned to GLOBALFOUNDRIES INC. 2 LLC ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Application filed by International Business Machines Corp filed Critical International Business Machines Corp Publication of US20110120519A1 publication Critical patent/US20110120519A1/en Publication of US8486751B2 publication Critical patent/US8486751B2/en Application granted granted Critical Assigned to GLOBALFOUNDRIES U.S. Assignors: PRETTYMAN, KEVIN M., PFEIFFER, GERD, HOVEL, HAROLD J., CLEVENGER, LAWRENCE A., KRAUSE, RAINER KLAUS, PETRAREA, KEVIN S., SAPP, BRIAN C. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.) Filing date Publication date Priority to EP09177175 priority Critical Priority to DE09177175.8 priority Assigned to INTERNATIONAL BUSINESS MACHINES CORPORATION reassignment INTERNATIONAL BUSINESS MACHINES CORPORATION ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Original Assignee International Business Machines Corp Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
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Google Patents Method of manufacturing a photovoltaic cellÄownload PDF Info Publication number US8486751B2 US8486751B2 US12/952,465 US95246510A US8486751B2 US 8486751 B2 US8486751 B2 US 8486751B2 US 95246510 A US95246510 A US 95246510A US 8486751 B2 US8486751 B2 US 8486751B2 Authority US United States Prior art keywords efficiency semiconductor wafer photovoltaic cell measuring photovoltaic Prior art date Legal status (The legal status is an assumption and is not a legal conclusion. Google Patents US8486751B2 - Method of manufacturing a photovoltaic cell US8486751B2 - Method of manufacturing a photovoltaic cell